Optimization of C2F6 Burnbox Destruction
McNabb, J. and Bischke, S.
Semiconductor International, Vol. 21 Issue 4 pp. 131-134
The semiconductor industry is a significant source of perfluorocarbon (PFC) emissions and is the largest emitter of intentionally produced PFCs. Hewlett-Packard has joined several other semiconductor companies in signing a Memorandum of Understanding with the US Environmental Protection Agency to track, record, and endeavor to reduce PFC emissions. Within HP and the semiconductor industry in general, the most emitted PFC is C sub 2 F sub 6, used primarily to clean process chambers following chemical vapor deposition. A study seeks control of these emissions.